Mathematical Modeling and Numerical Solution of the Behavior of a Microcantilever Disease Detector in MEMS Devices

Microelectromechanical Systems (MEMS) have come into existence only in the last decade. Diverse applications of microcantilevers in the field of sensorshave been explored by many researchers. Biosensors are sensors in which biomolecular interactions are used as sensing reactions. Biomolecular interactions, whencombined with a microcantilever’s platform, can produce an extremely powerful biosensing design. In present paper after description of model, system'sequations have been evolved and have been solved with numerical methods. The main aims of this paper areincreasing sensitivity of a micro biosensor respect to adsorption of antigens by means of applying voltage and obtaining frequency shifting of a microcantileverbiosensor due to antigen (FIP antiserum) adsorption and applied voltage. Static and dynamic electromechanical behavior of this system have been investigated and hasbeen shown that with increasing the applied voltage, equivalent stiffness of the system decreases andtherefore the sensitivity of sensor raises. Howeverincreasing the applied voltage has trivial effect on frequency shifting but it increases amplitude ofmeasurement considerably.

Keywords:

MEMS , Capacitive biosensors , Frequency shifting , Sensitivity