Numerical study of a planar DBD using Comsol Multiphysics simulator

In this study an axi-symmetric geometry of a planar disc shape DBD is simulated in DC discharge module of Comsol multiphysics simulator to investigate the effect of frequency, permittivity coefficient of dielectric and electrode material on electron density. Secondary electron emission constant of the electrode is predicted to have a remarkable influence on the electron density. Also it is seen that the calculated electron density increases with increasing the relative permittivity and frequency. Reviewing the simulation results of plasma homogeneity reveals the substantial importance of applied frequency.

Keywords:

DBD Plasma , Plasma Treatment , Comsol Multiphysics , DBD Simulation