Designing a RFMEMS Switch with a Spiral Bent and a Gold Membrane to Reduce the Stimulation Voltage

In the present study, a new structure has been introduced for microelectromechanical radio frequency switches to reduce the stimulation voltage. Since the main drawback of RFMEMS switches is their high stimulation voltage, it will be showed that lower spring constant and thereby lower stimulation voltage can be obtained by designing a fixed-fixed switch or a capacitive suspension bridge with a spiral bent membrane. Subsequently, a gold membrane was used instead of the cupper membrane and the stimulation voltage reduced by 13%. The results were compared with the reliable literature. The mentioned suggestions were simulated using Intellisutie finite element software

Keywords:

Actuation voltage , Membrance , RF MEMS switches , Spiral meander