Influence of different parameters on nonlinear frequency of hyper-elastic micro-resonators

Dielectric elastomer micro—bridge resonator that is sandwiched between two electrodes considered here. Geometric nonlinearity introduced with Von- Karman strain—displacement relationship and material nonlinearity modeled by Yeoh hyper-elastic model. Governing equation of motion is derived by Hamilton principle. We used Lindstedt-Pooincare method to achieve frequency response of the resonator. Mode shapes of microbeam under this model presented and influence of different parameters on nonlinear frequency studied. . It is shown that mode number has a significant effect on normalized frequency so that the higher the mode number, the more the influence of aspect ratio and initial maximum amplitude.