Transient characteristics of microelectromechanical systems considering squeeze film damping and electrostatic actuation
Publish place: 24th Annual Conference of Mechanical Engineering
Publish Year: 1398
نوع سند: مقاله کنفرانسی
زبان: English
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شناسه ملی سند علمی:
ISME24_672
تاریخ نمایه سازی: 21 مهر 1398
Abstract:
In this study, the GDQ method is used to evaluate transient characteristics of microelectormechanical systems. The presented model is nonlinear due to the von Karman—type geometric nonlinearity in the Euler—Bernou1li beam hypothesis. Also, the nonlinear Reynolds equation is utilized to model squeeze film damping phenomenon. Numerical results in the presence of squeeze film damping, dynamic distributed applied load, electrostatic actuation, and pull-in instability are obtained and examined with a parametric study. In addition, the accuracy of present method is verified by comprising the results with experimental data and excellent agreement between them are observed. It is found that by decreasing the resistance of fluid pressure, micro-beam will be actuated more conveniently. In particular, it is indicated that the geometry effect of the micro—beam on the pull—in voltage is significant.
Authors
Emran Khoshrouye Ghiasi
Master of Science, Department of Mechanical Engineering, Ferdowsi University of Mashhad;
Masoud Tahani
Professor, Department of Mechanical Engineering, Ferdowsi University of Mashhad;