Performance of different piezoelectric diaphragm shapes for Bio-medical applications

The human ear receives the sound signals from the ambient and converts those signals to the electrical domain and transmits them to the brain. According to the prevalence of human hearing impairments and necessity of using the hearing aid, this paper has been concentrated on the design of microphones to be implanted inside the ear. The intended design for this application is using micro-electro-mechanical technology and piezoelectric material. In order to optimal design, the proposed octagonal diaphragm was simulated in COMSOL software and was compared with available designs (Square and Hexagonal). According to the evaluated parameters, the designed diaphragm has the center diaphragm’s displacement and the first resonant frequency, 0.113 nm and 380 kHz respectively. The used piezoelectric material is AlN

Keywords:

implantable hearing aid , piezoelectric microphone , MEMS , AlN , diaphragm