Mohammad Tahmasebipour - Faculty of New Sciences and Technologies, University of Tehran, Tehran, Iran , Micro/Nano-Manufacturing Technologies Development Laboratory, Faculty of New sciences & Technologies,University of Tehran, Tehran, Iran
Mehrzad Modarres - Faculty of New Sciences and Technologies, University of Tehran, Tehran, Iran , Micro/Nano-Manufacturing Technologies Development Laboratory, Faculty of New sciences & Technologies,University of Tehran, Tehran, Iran
Hossein Salarpour - Faculty of New Sciences and Technologies, University of Tehran, Tehran, Iran , Micro/Nano-Manufacturing Technologies Development Laboratory, Faculty of New sciences & Technologies,University of Tehran, Tehran, Iran

Experimental research has shown that microcantilever-based sensors have wide and diverse applications in various fields. This necessitates the study of the mechanical behavior of microcantilevers under different resonance modes. This study investigated and evaluated the effect of size on the vibration behavior of an epoxy microcantilever in its first four frequency modes using the finite element method. Results showed that increased microcantilever thickness reduces resonant frequency. Large deformations were observed in the third and fourth frequency modes which increases the risk of failure in the microcantilever. Since the deformations in microcantilevers should be low in order for the sensor to have a long operating life, and the sensor has to be highly sensitive for increased accuracy, the second mode of resonant frequency and 20 ʽm were found as the best operating mode and the best thickness of the epoxy microcantilever-based sensor, respectively. A good agreement was observed between the results of this study and those obtained based on the couple stress theory, classical theory, and strain gradient elasticity theory

microcantilever, resonant frequency, finite element, modified couple stress theory, classical theory, strain gradient elasticity theory