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Title

Study of Laminated Composite MEMS and NEMS Performance in Nano Metric Operations

Year: 1396
COI: JR_MACS-4-1_003
Language: EnglishView: 132
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Authors

Sadegh Sadeghzadeh - School of new Technology, Iran University of Science and Technology
Moharram Habibnejad Korayem - Iran University of Science and Technology
Ahmad Homayooni - Iran University of Science and Technology

Abstract:

Precision of nano-metric operations is an important issue in nano-engineering studies. Several operative parameters might affect the quality of results. The parameters of the nano world are significant but not entirely controllable. However, the geometrical and mechanical properties of micro cantilevers are completely controllable. So, controlling the sensitivity of resulting image through t lamination design could be a proper approach. This paper analyses the effects of composite lamination on the performance of common Micro and Nano Electro Mechanical systems (MEMS and NEMS, respectively). Generalized Differential Quadrature (GDQ) and Generalized Differential Quadrature Element (GDQE) methods are used as semi-analytic solutions for regular and irregular domains, respectively. Validity, applicability and accuracy of the proposed approach are demonstrated and then the lamination effects on the nano-imaging and manipulation of nano particles by micro cantilevers are studied. This study shows that some laminations of micro cantilevers resulted in a better performance in nano-manipulation and imaging. Furthermore, clarifying the dependency of system sensitivity on the profile of the substrate is remarkable.

Keywords:

Paper COI Code

This Paper COI Code is JR_MACS-4-1_003. Also You can use the following address to link to this article. This link is permanent and is used as an article registration confirmation in the Civilica reference:

https://civilica.com/doc/1026139/

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Sadeghzadeh, Sadegh and Habibnejad Korayem, Moharram and Homayooni, Ahmad,1396,Study of Laminated Composite MEMS and NEMS Performance in Nano Metric Operations,https://civilica.com/doc/1026139

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