Mohammadreza Zamanzadeh - Urmia University, Department of Mechanical Engineering, Urmia,
Ilgar Jafarsadeghi Pournaki - Urmia University, Department of Mechanical Engineering, Urmia,
Saber Azizi - Department of Mechanical Engineering, Urmia University of technology, Urmia,

This study demonstrates the operational improvement of the repulsive force actuator by adding two upper lateral electrodes. The governing equation of motion as a generalized form of forced Mathieu equation is numerically solved by shooting technique. The 2D simulation predicts a 12.5 percent increase in the peak generated electrostatic force for the new design. The ability to realize large levitation stroke improves the signal-to-noise ratio and makes the new model capable of serving in various applications such as confocal microscopy and signal processing in the MEMS filter. The applied DC voltage is a useful tool for tenability of the configuration. The dynamic analysis is performed to characterize the nonlinear behavior of the system as well. The frequency response diagram implies how the added lateral electrodes affects the behavior and resonant frequency with softening\hardening trend. The latter effect might be exploit to actuating the middle electrode as sensing mechanism. The stability analysis is conducted to check the nature of the response in the multivalued region.

Repulsive force actuator, Large levitation stoke, FE modeling, Nonlinear dynamic