ali afzali - gas research division research institute of petroleum industry R.I.P.I
mehdi vahidi
fatemeh ahmad zadeh

Carbon nanotube CNT is the latest allotrope of carbon discovered by ijima in 1991 . Since then , CNTs have been a leading candidate in continued improvement of the performance , speed and density of integrated circuits. Since carbon nanotubes CNTs were discovered relevant researches hvae multiplied and the development of commercial applications such as hydrogen storage , atomic force microscope probe , microelectronic transistor and so on. High-quality and well - aligned carbon nanotubes are essential to the potential applications in the field of microelectronic industries . many kinds of synthetic techniques have been developed , such as laser ablation , plasma-enhanced chemical vapor deposition , arc discharge , pyrolysis , and thermal chemical vapor deposition. in this work we built a DC plasma source 1KW and designed a special quartz reactor for synthesis of aligned carbon nanotube . we use Ni/SiO2/Si substrates. samples surface should clean before oxidation and deposition the catalyst . then silicon samples first put in ultrasonic bath of alcohol and acetone for 5 minutes and then rinsed by distilled water.