Measuring Vibration in the Air Slide Tables of Ultra Precision Machines With the Different Number of Air Pockets

Vibration in the air slide tables of ultra precision machines prevents gaining accuracies within nanometer level. In this work, dissimilar types of internal vibration including small vibrations and pneumatic hammers have been tested and some measures have been offered to reduce their effects. This paper has also proceeded to the vibration tests on the air slide tables built with different number of air cell (air pocket). Comparison in critical pressures, self-excited vibration analysis, and predicting the behavior of contrastive points of the table (that a tool or a work piece might get installed on it) are the results of experiments by different variations of air pressures.