Simulation of a Microgripper with Electrothermal Actuator Using COMSOL Software Based on the Finite Element Method

Micro-electro-mechanical systems (MEMs) are Combination of electrical and mechanical components in Micron dimensions. In recent years, holding, actuating methods and handling of MEMs components such as microgripper, microsensors and etc. have been deeply studied. Microgrippers for handling, positioning and assembling of micro components are very useful so that for clamping need actuation created using electrostatic, electrothermal, and electromagnetic actuators. In this paper, a new design of an electrothermal microgripper with U-shape actuators for holding and carrying a wide range of parts at the same time, For voltages corresponding between ۱ to ۱۰ volts, have been fabricated. The microgripper is made of silicone with thickness of ۲۵ microns, and pieces between ۴۶۰ to ۴۸۰ microns that can hold it. The behavior of the microgripper in Multi physics powerful finite element software (COMSOL) was evaluated and the displacements of arms hold and heat generations have been simulated.

Keywords:

Microgripper , Electrothermal Actuator , Finite element simulation , MEMS