Fabrication of a Novel MEMS Capacitive Microphone using Lateral Slotted Diaphragm

external amplifier was able to detect the sound waves from microphone on speaker and oscilloscope. The maximum amplitude of output speech signal of amplifier is ۴۵ mV, and the maximum output of MEMS microphone is ۱.۱۲۵ µV.

Keywords:

MEMS , Microphone , Lateral slots , Diaphragm stiffness

Authors

bahram azizollah Ganji

Electrical Engineering, Babol University of Technology

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https://civilica.com/doc/1392030

شناسه ملی سند علمی:

JR_IJE-23-3_001

تاریخ نمایه سازی: 18 بهمن 1400

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azizollah Ganji, bahram,1389,Fabrication of a Novel MEMS Capacitive Microphone using Lateral Slotted Diaphragm,https://civilica.com/doc/1392030

Scientometrics

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Ranking of Babol Noshirvani University of Technology

Type of center: دانشگاه دولتی

Paper count: 7,043

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