Mohammad Tahmasebipour - Faculty of New sciences and Technologies, University of Tehran, Tehran, ۱۴۳۹۵ -۱۵۶۱, Iran Micro/Nanofabrication Technologies Lab, Faculty of New Sciences and Technologies, University of Tehran, Tehran, ۱۴۳۹۵ -۱۵۶۱, Iran
Younes Tahmasebipour - Micro/Nanofabrication Technologies Lab, Faculty of New Sciences and Technologies, University of Tehran, Tehran, ۱۴۳۹۵ -۱۵۶۱, Iran
Mahya Boujari Aliabadi - Faculty of New sciences and Technologies, University of Tehran, Tehran, ۱۴۳۹۵ -۱۵۶۱, Iran Micro/Nanofabrication Technologies Lab, Faculty of New Sciences and Technologies, University of Tehran, Tehran, ۱۴۳۹۵ -۱۵۶۱, Iran
Shadi Ebrahimi - Faculty of New sciences and Technologies, University of Tehran, Tehran, ۱۴۳۹۵ -۱۵۶۱, Iran Micro/Nanofabrication Technologies Lab, Faculty of New Sciences and Technologies, University of Tehran, Tehran, ۱۴۳۹۵ -۱۵۶۱, Iran

In this study, the micro electro-polishing method was employed to improve the surface quality of microbeams machined by the micro WEDM method and to remove the recast layer. This approach changes the dimensions of the microbeams, as a result of the electrochemical corrosion, in addition to the elimination of the recast layer. To diminish the impact of this process on the dimensional deviation of the fabricated microbeams, the influence of the micro electro-polishing process parameters such as voltage, duration, cathode diameter, and electrolyte composition on the dimensional deviation of microbeams was studied using the Taguchi method. The optimum values of process parameters were determined by the S/N ratios analysis, and the order of parameters importance was determined through analysis of variance of the S/N ratios. It was found that the optimal levels of the process parameters are voltage of ۲ V, process duration of ۲۰ s, cathode diameter of ۵۰ mm, and electrolyte composition of ۲۵-۵-۴۰ ml (sulfuric-phosphoric-water) within the range of experiments. By using the optimum values of the parameters, the dimensional deviations were found to be ۵.۲۳ times lower compared to the average of the results.  The importance of process parameters was found to follow this order: electropolishing duration, electrolyte composition, cathode diameter, and process voltage.

Microelectromechanical Systems, MEMS, micro WEDM, micro polishing, micro electropolishing, wire electrical discharge machining