Effects of the dielectric materials on the performance of the electrostatic microstructures

Publish Year: 1401
نوع سند: مقاله کنفرانسی
زبان: English
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شناسه ملی سند علمی:

ISME30_452

تاریخ نمایه سازی: 29 خرداد 1401

Abstract:

Nowadays, research on new materials with excellent electrical performance, such as high dielectric constant, has become one of the most prominent areas of research worldwide. Therefore, having detailed studies in this field regarding the behavior of microelectromechanical (MEMS) systems is very important. In the present work, a nonlinear model for the mechanical behavior of a capacitive microbeam is presented by considering the theories related to the dielectric properties of materials. The purpose of this study is to increase the electrostatic force obtained in capacitive structures to reduce the required voltage. In order to do this, a material with a high dielectric constant is used as part of the substrate that forms the capacitor. Based on the mentioned model, motion equations are obtained and solved by Galerkin method after order reducing. Finally, under the abovementioned influence, the analysis of nonlinear frequency responses of the proposed system has been presented.

Authors

Samira Valizadeh

MS Student, Urmia University, Urmia;

Mohammad Fathalilou

Associate Professor, Urmia University, Urmia;

Ghader Rezazadeh

Professor, Urmia University, Urmia;