Analysis and design of microwave resonant plasma source for Iranian Space Plasma Simulation Chamber

In the present study, the microwave resonant plasma source has been designed to provide the ionosphere like condition inside the Iranian Space Plasma Simulation Chamber (ISPSC). This chamber contains plasma with electron density of ۱×۱۰۵-۱×۱۰۱۰ cm-۳ and temperature of ۱-۵eV. In order to reach these plasma parameters inside the ISPSC, the plasma source cylindrical cavity mode TE۱۱۲ is used. Then, the produced plasma is transferred into the Chamber through the holes created on the end wall of the cavity. Since the plasma characteristics in the resonant cavity depend on the gas pressure and the input power, the microwave and plasma interaction, power absorption, electron density and temperature were evaluated by the Comsol Multiphysics and obtained results have been presented.

Keywords:

Plasma Source , Cavity , Comsol , Space Plasma