Mehrdad Mottaghi - Biomechanics Division-Mechanical Engineering Department- Sahand University of Technology
Farzan Ghalichi - Biomechanics Division-Mechanical Engineering Department- Sahand University of Technology
Habib Badri Ghavifekr - Electrical Engineering Department- Sahand University of Technology

This paper presents design and characterization of a microaccelerometer designated forintegration into cataract surgical probe to detect hardness of different eye tissues during cataract surgery.Soft posterior lens capsule of eye can be easily damaged in comparison with hard opaque lens since thesurgeon can not see directly behind cutting needle during the surgery. Presence of microsensor helps thesurgeon to avoid rupturing posterior lens capsule which if occurs leads to severe complications such asglaucoma, infection, or even blindness. The microsensor having overall dimensions of 480 μm x 395 μm isable to deliver significant capacitance variations during encountered vibration situations which makes itcapable to distinguish between different types of tissue. Integration of electronic components on chip ensureshigh level of reliability and noise immunity while minimizes space and power requirements. Physicalcharacteristics and results on performance testing, proves integration of microsensor as an effective tool toaid the surgeon during this procedure.

Cataract surgery, MEMS, Microsensor, Phacoemulsification