Behnam Okhravi - Hakim Sabzevari University, Faculty of Electrical and Computer Engineering, Sabzevar, Iran
Mohsen Ghasemi - Hakim Sabzevari University, Faculty of Electrical and Computer Engineering, Sabzevar, Iran

This work presents the design and simulation of AlGaN/GaN based UV-A LED on a sapphire substrate. We used periodic layers as multiple-quantum-well to reach better optoelectronic properties and used EBLs to reduce the leakage current in modern multi-quantum-well. We deposited ITO as a top layer and Ni/Au to form ohmic contacts to p-type GaN and approach higher frequency response. We performed simulation by “SILVACO Software” and followed the fabrication process based on “ATHENA” rules and techniques.

Silvaco, LED, Ultraviolet, Deposition, Etching, Athena, Ohmic contact, Oxide, GaN