Analytical analysis of an electro statically actuated nano beam based on coupled stress theory

When the size of the structural elements such as beams, plates, and membranes (used as components in micro or nano electro mechanical system) becomes small, both the experimental and atomistic modelling methods show a considerable size effect in mechanical properties of these structures. On the other hand, the classical continuum theories cannot predict this size dependent behaviour of micro and nano structures. This paper aims to find an analyticalresponse of an electro statically actuated micro beam using recently developed nonclassical methods named, the modified couple stress. Taylor expansion is used to expandelectro-statically force and the equation of beam is solved using Modified Variation Iteration(MVI) method analytically. Consequently, the response of the system under different DC voltages and the effect of number of Taylor expansion terms are analysed in the end of the paper

Keywords:

Nano and Micro Beam , Couple Stress Theory , Variation Method