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A Fuzzy Inference System to Maintain Ultrasonic Cleaning Bath Efficiency for Semiconductor Applications

عنوان مقاله: A Fuzzy Inference System to Maintain Ultrasonic Cleaning Bath Efficiency for Semiconductor Applications
شناسه ملی مقاله: ICFUZZYS22_027
منتشر شده در بیست و دومین کنفرانس سیستم­ های فازی ایران در سال 1402
مشخصات نویسندگان مقاله:

Ali Rezaei - Iran University of Science and Technology, Electrical Engineering School, Tehran, Iran

خلاصه مقاله:
In this paper, fuzzy control concept is adopted to straightforwardly construct acontroller to maintain ultrasonic cleaning bath efficiency. The aforementioned schememakes use of bath turbidity and temperature to maintain the generated power whichis delivered to the ultrasonic generating element. The single output power surfacewas generated by implementing Mamdani fuzzy inference system and the results werediscussed.

کلمات کلیدی:
Fuzzy Controller, Ultrasonic Cleaning, Fuzzy Inference System (FIS), Smart Systems, Artificial Intelligence (AI)

صفحه اختصاصی مقاله و دریافت فایل کامل: https://civilica.com/doc/2040086/