Ali Mehrnezhad - M. Sc. Student , EED, Amirkabir University of Technology
Amir A. Suratgar - Assistant Professor, EED, Amirkabir University of Technology
Saeed Khatami - Assistant Professor, EED, Amirkabir University of Technology
Sima Sobhiyeh - M. Sc. Student , EED, Amirkabir University of Technology

This paper proposes a complete dynamical model of MEMS-based AC voltage reference sources. Static and dynamic models are investigated in both ideal and non-ideal conditions.State space equations are proposed to extract the non-ideal dynamic model considering instability factors such as, offsetvoltage across dielectric layer and built-in voltage. These state space equations provide the opportunity to control system behaviour, enabling accurately stabilized reference voltages

AC Voltage References, MEMS Capacitor, Builtin voltage, Modelling