Mahdi Nasiri - Sahand University of Technology
Habib Badri Ghavifekr
Hadi Mirzajani

in this paper, a new kind of frequency reconfigurable microstrip patch antenna based on MEMS (microelectromechanical systems) technology is proposed. In fabrication of this antenna, a combination of bulk and surface micromachining is used. Thermal actuation is utilized as driving mechanism. The antenna patch is discretized to facilitate vertical displacement of the patch and as a result decreasing power consumption of actuation mechanism. Downward relocation of discretized patch, toward fixed ground plane, reduces the air gap height, and subsequently operating frequency of the antenna. Operating frequency of the antenna can be shifted continuously from 17.387 GHz to 16.812 GHz in the bandwidth of 680 MHz and 645 MHz respectively. The tuning range of 575MHz is realized by a 2V CMOS compatible voltage and acceptable power consumption. Finite-element analyses show a good microwave performance and mechanical behavior over the tuning range.

micromachining; reconfigurable microstrip patch antenna; MEMS; thermal actutor