Analytical Analysis of Capacitive Pressure Sensor with Clamped Diaphragm

In this paper, analytical analysis of capacitive pressure sensor with clamped diaphragm is presented. Mechanical and electrical properties of the sensor are theoretically analyzed based on theory of thinplates with small deflection and the results are evaluated using finite element analysis. The centraldeflection and capacitance values under uniform external pressure are calculated. Comparison of theoretical results shows good agreement with finite element analysis. The results indicate that the mathematical model has a high accuracy to determine the sensor behaviors

Keywords:

Capacitance , Deflection , Capacitive Pressure Sensor , Diaphragm Deflection