Omid Kalantari - Sharif university of technology, international campus , department of Mechanical Engineering
Abolghasem Zabihollah - Sharif university of technology, international campus , department of Mechanical Engineering
Soheil Zoveidanian - Sharif university of technology, international campus , department of Mechanical Engineering

In this paper design and application of micro cantilever beam for Atomic Force Microscopy has been designed for scanning very smooth surfaces. In order to illustrate the functionality and performance of the proposed system, smooth surface modeled as a sine shape is used to detect the roughness. Scanning of roughness in very smooth surfaces is very complicated process which needs various data gathering and application tools. An atomic force scanner modeled with a cantilever beam integrated with two Piezoelectrics as actuator and sensor. It has been shown that the proposed system may detect the surface roughness in the order of micro size very accurately and efficiently.

Atomic Force scanner, piezoelectric,MEMS, roughness detecting