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Characterization of TiN, CrN and (Ti, Cr) N Coatings Deposited by Cathodic ARCEvaporation

عنوان مقاله: Characterization of TiN, CrN and (Ti, Cr) N Coatings Deposited by Cathodic ARCEvaporation
شناسه ملی مقاله: JR_IJE-27-7_014
منتشر شده در شماره 7 دوره 27 فصل July در سال 1393
مشخصات نویسندگان مقاله:

m Akbarzadeh - Department of Materials Engineering, Isfahan University of Technology, Isfahan, Iran
a Shafyei
h.r Salimijazi

خلاصه مقاله:
In this investigation, physical vapor deposited Ti-Cr-N coatings were coated on tool steel substratesusing reactive arc evaporation. Microstructure and mechanical properties of coatings such asroughness, thickness, phase composition, hardness, Young’s modulus and coefficient of friction werestudied. Phase compositions were investigated by X-ray diffraction method. Surface microstructureand morphology were studied using scanning electron microscope (SEM) and coating compositionswere determined by energy dispersive spectroscopy (EDS). Mechanical properties were measured bynano indentation. The friction behavior of the coatings were investigated using ball-on-disc tests undernormal loads of 7 N .The results showed that (Ti, Cr)N and TiN coatings consisted of only one cubicphase solid solution, while CrN coatings consisted of hexagonal Cr2N and cubic CrN phases. Averagegrain size of the coatings was found to be in the range of 14 to 20 nm. Mechanical behavior of the (Ti,Cr)N coatings was related to the Ti content, i.e. hardness decreased with decreasing Ti content.

کلمات کلیدی:
Physical Vapor DepositionThin FilmsPhysical and Mechanical PropertiesTi-Cr-N Coatin

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