Tracking and Shape Control of a Micro-cantilever using Electrostatic Actuation
Publish Year: 1393
نوع سند: مقاله ژورنالی
زبان: English
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شناسه ملی سند علمی:
JR_IJE-27-9_014
تاریخ نمایه سازی: 12 آبان 1393
Abstract:
In this paper, the problems of state estimation, tracking control and shape control in a micro-cantileverbeam with nonlinear electrostatic actuation are investigated. The system’s partial differential equationof motion is converted into a set of ordinary differential equations by projection method. Observabillityof the system is proven and a state estimation system is designed using extended Kalman filter (EKF)algorithm. A tracking control system is designed to make a specific point of the beam follow areference signal. The effect of mode selection to include in model on controller performance is alsoinvestigated. Based on the tracking controller a shape control algorithm is designed to form the shapeof beam into a desired shape. The proposed algorithms are validated by numerical simulation andresulted in a promising performance
Keywords:
Micro-cantileverElectrostatic ActuationState EstimationTracking ControlShape Control
Authors
F Karami
Department of Mechanical Engineering, Sharif University of Technology, Tehran, Iran
H Salarieh
Department of Mechanical Engineering, Sharif University of Technology, Tehran, Iran
R Shabani
bDepartment of Mechanical Engineering, Faculty of Engineering, Urmia University, Urmia, Iran