F Karami - Department of Mechanical Engineering, Sharif University of Technology, Tehran, Iran
H Salarieh - Department of Mechanical Engineering, Sharif University of Technology, Tehran, Iran
R Shabani - bDepartment of Mechanical Engineering, Faculty of Engineering, Urmia University, Urmia, Iran

In this paper, the problems of state estimation, tracking control and shape control in a micro-cantileverbeam with nonlinear electrostatic actuation are investigated. The system’s partial differential equationof motion is converted into a set of ordinary differential equations by projection method. Observabillityof the system is proven and a state estimation system is designed using extended Kalman filter (EKF)algorithm. A tracking control system is designed to make a specific point of the beam follow areference signal. The effect of mode selection to include in model on controller performance is alsoinvestigated. Based on the tracking controller a shape control algorithm is designed to form the shapeof beam into a desired shape. The proposed algorithms are validated by numerical simulation andresulted in a promising performance

Micro-cantileverElectrostatic ActuationState EstimationTracking ControlShape Control