Mohammad Hossein Bayati chaleshtari - Mechanical Engineering Department, shahrood University of Technology, shahrood,semnan, Iran
Amir jalali - Mechanical Engineering Department, shahrood University of Technology, shahrood,semnan, Iran

Converting constant rotary motion into intermittent rotary motion gives rise to a range of useful applications in silicon micromachining. This paper discusses the design and fabrication of one such mechanism called the Geneva Wheel mechanism. The standard SUMMIT process has been made use of in developing this. All the related mathematics of the Geneva wheel was developed and the system was analysed.

Geneva Mechanism, Microengines, polysilicon