Nano Piezoresistive accelerometer Modeling

In this paper, behaviour of the piezoresistive picture-frame accelerometer is modeled and studied in therange of medium-high gravity by using the elasticity analysis method (EAM). The model, reviews the effect ofapplying piezoresistance in two Micro and Nano scales on the sensitivity of accelerometer. According to theresults, by using Nano scale piezoresistance instead of micro scale, increased sensitivity of about 2023% isachieved.

Keywords:

Modelling , Nano accelerometer , Piezoresistance , Sensitivity