Mehdi Habibi - Faculty of Electrical & Computer Engineering, University of Tarbiat Modares, Tehran
Sara Darbari - Faculty of Electrical & Computer Engineering, University of Tarbiat Modares, Tehran
Shima Rajabali - Faculty of Electrical & Computer Engineering, University of Tehran, Tehran
Vahid Ahmadi - Faculty of Electrical & Computer Engineering, University of Tarbiat Modares, Tehran

For the first time,we have fabricated a field emission pressure sensorbased on CNTs, while using grapheneas the sensitive membrane. The proposed sensor can serve as a highly sensitive pressure sensor which meosures thepressure value and direction. In this structure, CNTs have been grown inside the micro- hoies, etched in siliconsubstrate, then graphene sheets have been dispersed on the hole array. We have investigated the outputcharacteristics of the fabricated sensor which shows a sensitivity of about 2 μA/KPa.

Graphene; CNT; Field emission; Pressure sensor