A Simple Method for Resistive CNT-Based Sensor Fabrication Using Ultra-Low Temperature Grown CNTs

Resistance of Carbon nanotube (CNT) films can be used for detecting applications. This article presents anovel method for fabricating CNT-based resistive sensors. The proposed structure provides more convenient process for making electrical contact which is one of the problematic steps in sensor fabrication process. The well-aligned multi-walled carbon nanotubes (MWCNTs) were grown by DC-PECVD at an ultra-low temperature (i.e., as low as 250 ͦC). A thin layer (10 nm) of Ni was deposited on Indium Tin Oxide as a growth catalyst. Grown CNTs annealed at 300 ͦC with oxygen flow to remove amorphous carbons in order to improve their sensitivity. Electrical measurements in different temperatures and pressures were done to find out responsivity of the fabricated sensor.

Keywords:

Multi-walled carbon nanotube , Low temperature growth , Resistive sensor , Electrical contact