Ahmad R. Norouzi - Faculty of New Sciences & Technologies University of Tehran Tehran, Iran
Alireza Nikfarjam - Faculty of New Sciences & Technologies University of Tehran Tehran, Iran
Hassan Hajghassem - Faculty of New Sciences & Technologies University of Tehran Tehran, Iran

A 3D free space micromirror utilizing both electromagnetic and bimetal actuators based on microfabrication processes is designed. Beneficiary points using hybrid actuator are reliability, energy performance and amplitude of deflections. This mirror is designed of single crystalline Silicon and Aluminum layer. The fabrication process of this micromirror is significant point. Finally, the design analyzed by finite elements method in Comsol Multiphysics Software and presented

3D Micromirror, Free space micromirror, electromagnetic actuator, bimetal actuator, hybrid actuator