Static Deflection of Electrically Actuated Microplates, an Extended Kantorovich Approach

This paper presents an Extended Kantorovich approach to simulate the static deflection of microplates under electrostatic actuation. The model accounts for the electric force nonlinearity of the excitation. At the first, the problem of microplate deflection under electrostatic actuation is formulated. Then starting from a one term Galerkin approximation and following the Extended Kantorovich procedure, the partial differential equation governing the microplate deflection is discretized to two nonlinear ordinary differential equations with constant coefficients. These equations are then solved iteratively with a rapid convergence procedure to yield the desired solution. The results are validated, comparing them ith other theoretical results and experimental findings, reported in the literature. It is shown that rapid convergence, high precision and independency of initial guess function make the EKM an effective and accurate design tool for design optimization.

Keywords:

Extended Kantorovich Method , Microplate , Electrostatic actuation , Static pull-in