An Investigation on Two Types of Crystalline Micro-diamond Film Coated Tools Lapping with Sapphire Wafer

Two types of micron-diamond films were prepared on YG6 substrate by hot filament chemical vapor deposition (HFCVD) method. Morphology and orientation of crystalline growth were evaluated by Scanning Electron Microscopy (SEM) and X-ray Diffration (XRD). The surface of the diamond film-coated tools and sapphire wafer was compared before and after lapping . The Raman spectra of two micron-diamond film indicated that a significant change occurred in surface properties after lapping. This change was explained as graphitization of the diamond surface. The friction coefficient of the ZMDF was larger than that of the FMDF tool. The surface roughness of the sapphire wafer lapped by FMDF (<110> texture) was lower than that of ZMDF (<111> texture). Comparing the two kinds of micron-diamond film, the lapping effect of the FMCD tool was found to be better.

Keywords:

Micron-diamond Film , Lapping , Sapphire Wafer