Fabrication of 3D Structures Using Deep Vertical Etching of Polyethylene Terephthalate Plastic Suitable for RF and Photonic Applications

Using a novel technique for deep vertical etching of PET, realization of 3D structures is investigated. Fabrication of these structures including Photonic Crystals, Spectrometer, 3D Inductors and some other MEMS devices is achieved using a highly flexible PET itself or as a mold to build desirable shapes.

Keywords:

3D inductor , Photonic Crystal , Vertical etching , PET