Performance Analysis of Microsystems in the Presence of Pull-In Instability

Publish Year: 1394
نوع سند: مقاله کنفرانسی
زبان: English
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شناسه ملی سند علمی:

KBEI02_239

تاریخ نمایه سازی: 5 بهمن 1395

Abstract:

Objective of the current work is to represent performance analysis of microsystems in the presence of pullin instability phenomenon. To this end, the Euler-Bernoullibeam theory and non-linear Reynolds equation are considered, and the generalized differential quadrature method (GDQM)is employed to solve the nonlinear partial differentialgoverning equations. A parametric study conducted, focusing on the combined effects of geometric non-linearity, Squeezefilmdamping (SQFD), distributed load, inertial gap, and material properties. The results reveal that the pull-ininstability of poly-silicon micro-beam is strongly sizedependent.It is also demonstrated that neglecting pressure in Reynolds equation will cause smaller values in pull-in time.

Authors

Emran Khoshrouye Ghiasi

Department of Mechanical Engineering Ferdowsi University of Mashhad Mashhad, Iran