Emran Khoshrouye Ghiasi - Department of Mechanical Engineering Ferdowsi University of Mashhad Mashhad, Iran

Objective of the current work is to represent performance analysis of microsystems in the presence of pullin instability phenomenon. To this end, the Euler-Bernoullibeam theory and non-linear Reynolds equation are considered, and the generalized differential quadrature method (GDQM)is employed to solve the nonlinear partial differentialgoverning equations. A parametric study conducted, focusing on the combined effects of geometric non-linearity, Squeezefilmdamping (SQFD), distributed load, inertial gap, and material properties. The results reveal that the pull-ininstability of poly-silicon micro-beam is strongly sizedependent.It is also demonstrated that neglecting pressure in Reynolds equation will cause smaller values in pull-in time.

Micro-beam; Pull-in instability; Reynolds equation; Dimensionless variables