Hydrogen Detection using Capacitive Method

In this study a MOS capacitor hydrogen sensor with Pd/SiO2/Si structure has been fabricated. The palladium nanoparticles by chemical method are synthesized and then characterized by transmission electron microscope (TEM). The sensing mechanism of the hydrogen detection by MOS capacitor sensor has been explained and theoretical and experimental results have been compared. The presented sensor illustrates a designing of hydrogen detectors with very fast response and recovery speed.

Keywords:

nanoparticles , Response , Recovery , Hydrogen