Morasaamani malkeshi - Department of chemistry, Faculty of Basic Sciences, Sciences and Research Campus, Islamic Azad University, Tehran,Iran
Karim zare - Department of chemistry, Faculty of Basic Sciences, Sciences and Research Campus, Islamic Azad University, Tehran,Iran
Mahmood ghoranneviss - Plasma Physics Research Center, Science and Research Branch, Islamic Azad University

DLC nano-structures have attracted extensive research interest since their discovery in 1970 by Aisenberg using the ion beam deposition (IBD) method [1]. This is due to their unique and interestingmechanical, chemical, and electrical properties [2-3] as well as wide range of potential applications [5].We also studied the effect of Co catalyst separately, on the synthesis, structure and morphology of DLCs on the substrate of glass in the PECVD system. The diamond-like carbons produced under the same conditions were characterized used Scanning electron microscopy (SEM), X-ray diffraction (XRD), Raman Spectroscopy and Atomic Force Microscopy (AFM).

Diamond-like carbon, DC-PECVD, Catalyst, AFM, XRD, Raman spectroscopy, SEM