Mechanical Sensitivity Enhancement in ESG MEMS by RotorGeometry Optimization

In this article, we report a 13% magnification of Mechanical Sensitivity in MEMS Electrostatically Suspended Gyroscopes (ESG) by modification of angle of hole in the rotor. Through careful examination of the performance parameters and finite element simulations the existing design parameters are modified. The parameters examined were the materials used for the rotor, and the geometrical parameters of the rotor,such as thickness, hole angles and fin angles. Through mechanical and numerical analyse of the aforementioned design parameters, general trends are determined and then by finite element modelling of the mechanical properties, such as stress/strain distribution on the rotor the inferences made are confirmed. Finally, the proposed modified design was evaluated against the Mechanical Sensitivity (MS), and stressdistribution on the surface of rotor and promising results was observed. In addition to 13% magnification of the MS, the modified design will improve the fabrication process

Keywords:

Electrostatically Suspended Gyroscope (ESG) , Microelectromechanical systems (MEMS) , Mechanical Sensitivity , Stress Distribution , Stress Concentration , Fabrication Process