Mohammad Tahmasebipour - Faculty of New Sciences and Technologies, University of Tehran, Tehran, Iran , Micro/Nano-Manufacturing Technologies Development Laboratory, Faculty of New sciences & Technologies,University of Tehran, Tehran, Iran
Mehrzad Modarres - Faculty of New Sciences and Technologies, University of Tehran, Tehran, Iran , Micro/Nano-Manufacturing Technologies Development Laboratory, Faculty of New sciences & Technologies,University of Tehran, Tehran, Iran
Hossein Salarpour - Faculty of New Sciences and Technologies, University of Tehran, Tehran, Iran , Micro/Nano-Manufacturing Technologies Development Laboratory, Faculty of New sciences & Technologies,University of Tehran, Tehran, Iran

Euler-Bernoulli microcantilevers are an important components of microelectromechanical sensors that are regarded as high-sensitivity sensors. The sensing principle of such sensors is based on resonant frequency shift or the microcantilever deflection variation. Therefore, identification of static and dynamic behavior of such sensors seems necessary. In this study, the finite element method was used to predict the static behavior of Euler-Bernoulli microcantilevers. Four epoxy microcantilevers with different dimensions and specific loadings and boundary conditions were statically analyzed. The effect of size on the deflection of microcantilevers were examined and evaluated. It was observed that an increased thickness reduces the deflection, and in a given cantilever, the maximum deflection occurs at its end. Results were consistent with those obtained using the couple stress, classical, and strain gradient elasticity theories

Microcantilever; Micro-Sensor; Finite Element Method; Couple Stress; Strain Gradient Elasticity