Sayed mohammad ali zanjani - Department of Electrical Engineering, Najafabad branch, Islamic Azad University, Najafabad, IRAN.
Ehsan etemadnia - Department of Electrical Engineering, Najafabad branch, Islamic Azad University, Najafabad, IRAN.

In this study, the design and simulation of a drive and readout circuit for a microelectromechanical sensor (MEMS) is developed. The design of the readout circuit of the capacitance variations of gyroscope sensor is the most important part of the design that includes a continuous-time converter capacitance to the voltage using a T-shaped trans-impedance amplifier to detect capacitance variations and an output signal amplifier to reach the optimum level. These circuits are simulated using Hspice and Cadence 16.6 software in 0.18µm CMOS technology. In this study with ±1.8V supply voltage, the followings have been achieved: gain and cutoff frequency of the designed operational amplifier is 108dB and 6.25MHz, gain and cutoff frequency of TIA is 130dB and 30MHz, power consumption of the TIA is 6.5mW, output-referred noise is 0.558nV/√Hz and finally the power consumption of the whole circuit is 200mW. The improvements of the result compared to the previously reported values is significant.

gyroscope, sensor, drive circuit, MEMS