Masoud Noroozi - Assistant Professor, Faculty of Mechatronic, Karaj Islamic Azad University Karaj, ۳۱۴۸۶۳۵۷۳۱, Iran

Thin films have many applications in science and technology especially in recent years in optical mirrors, MEMS/NEMS, sensors and actuators, thermal resistants, solar panels and so on. The reliability and functionality of the system is affected by the mechanical behavior determined using the elasticity problem of the coupled film-substrate system through a complicated process. In this work, a procedure is introduced to investigate the mechanical behavior of the film-substrate system; in which the mechanical behavior is approximated by the behavior of the substrate (as the dominant environment) and is modified by the behavior of the film (as the follower). The proposed method is described and its application is demonstrated for a coated disk under thermal loading.

Thin film, Substrate, Elasticity, Thermal loading, Stress, Strain