Transfer function analysis for drift compensation in nanomanipulation inverse control
عنوان مقاله: Transfer function analysis for drift compensation in nanomanipulation inverse control
شناسه ملی مقاله: ICME10_173
منتشر شده در دهمین کنفرانس ملی مهندسی ساخت و تولید در سال 1388
شناسه ملی مقاله: ICME10_173
منتشر شده در دهمین کنفرانس ملی مهندسی ساخت و تولید در سال 1388
مشخصات نویسندگان مقاله:
S Sadeghzadeh - Ph.D. Student, Faculty of Mechanical Engineering, Iran University of Science and Technology
M.H Korayem - Professor, Faculty ofMechanical Engineering, Iran University of Science and Technology
خلاصه مقاله:
S Sadeghzadeh - Ph.D. Student, Faculty of Mechanical Engineering, Iran University of Science and Technology
M.H Korayem - Professor, Faculty ofMechanical Engineering, Iran University of Science and Technology
This paper addresses a new approach for complete driftmodeling and compensation on the Scanning Probe Microscopes (SPMs). Drift is described as remained error after hysteresis and creep compensation and could seriously affect the SPM's performance. The comprehensive model introduced here is effective, simple and mathematically traceable.Although an analytical relation is introduced for heat generation in piezotubes, for piezo scanners, micro cantilever and substrate as micro components, the current relations are used. Transfer function analysis is an effective schematical approach for drift showing.Comparing experimental results show that in both modes this model is effective and introduces a new approach for velocity-independent drift modeling.
کلمات کلیدی: Scanning Probe Microscope, Drift, Nano manipulation, Transfer function analysis
صفحه اختصاصی مقاله و دریافت فایل کامل: https://civilica.com/doc/81811/