S Sanjabi - Department of Materials Science andEngineering, Sharif University of Technology,P.O.Box: ۱۱۳۶۵-۹۴۶۶, Tehran-Iran.
S.K Sadrnezhaad - Department of Materials Science andEngineering, Sharif University of Technology,P.O.Box: ۱۱۳۶۵-۹۴۶۶, Tehran-Iran.
Z.H Barber - Device Materials Group, Department of MaterialsScience and Metallurgy, University of Cambridge,CB۲ ۳QZ, UK.

NiTi-based shape memory thin films have attracted much attention in recent years as intelligent and functional materials in the rapidly growing field of Micro-Electro- Mechanical-Systems (MEMS) and Bio-MEMS. In this paper the fabrication of NiTi and NiTiHf thin films by a DC magnetron sputtering using simultaneous deposition from elemental targets is reported. The characterization of the films were performed using a differential scanning calorimetry (DSC) and X-ray diffractometry (XRD) to explore transformation temperatures and structure as a function of film composition. The results showed that film composition is a critical issue to control transition temperatures. The proposed technique can be considered as a flexible fabrication method to control precise film composition, which leads to manufacturing of shape memory microactuators in a wide range of applications.

NiTi-based thin films; sputtering; shape memory effect