Simulation of electrostatic micro-Tweezers by Using Shaped IDT Finger Comb Drive

Finite element method (FEM) analysis is employed for simulation of electrostatic actuation mechanism formicro-tweezers applications. The coupled multiphysical equations including electrostatic, solid mechanic and arbitraryLagrangian–Eulerian (ALE) are solved for the proposed electrostatic micro-tweezer. It is shown that using shapedinterdigitated (IDT) finger comb drive has stronger electrostatic force for micro-gripping effect. The electric field andmechanical displacement study are investigated here. Based on the results, the teeth shaped IDT fingers are of interestfor actuation mechanisms such as gripping effect.

Keywords:

micro-tweezers , interdigitated electrodes , FEM , electrostatic force