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Study on the dynamic and static pull in instability of a fully clamped micro plate considering self stretching and residual stress effects

عنوان مقاله: Study on the dynamic and static pull in instability of a fully clamped micro plate considering self stretching and residual stress effects
شناسه ملی مقاله: ISME17_700
منتشر شده در هفدهمین کنفرانس سالانه مهندسی مکانیک در سال 1388
مشخصات نویسندگان مقاله:

mohammad reza ghzavi - assistant professor of mech
ghader rezazadeh - associate professor of mechanical engineering
majid mohammadi moghadam - assistant professor of mech eng dep
saber azizi - ph.D mehc eng student tarbiat modares university

خلاصه مقاله:
In this paper the static and dynamic pull-in instability of a fully clamped miro plate considering the effects of residual stress , and axial stress have been studied.

کلمات کلیدی:
micro plate, pull-in voltage, MEMS, electrostatic actuation, finite element method

صفحه اختصاصی مقاله و دریافت فایل کامل: https://civilica.com/doc/90861/