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Determination of Optical Properties in Germanium Carbon Coatings Deposited by Plasma Enhanced Chemical Vapor Deposition

Publish place: Iranian Journal of Materials Science and Engineering، Vol: 15، Issue: 1
Publish Year: 1396
Type: Journal paper
Language: English
View: 176

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Link to this Paper:
https://civilica.com/doc/1606557

Document National Code:

JR_IJMSEI-15-1_004

Index date: 19 February 2023

Determination of Optical Properties in Germanium Carbon Coatings Deposited by Plasma Enhanced Chemical Vapor Deposition abstract

In this research, Germanium-carbon coatings were deposited on ZnS substrates by plasma enhanced chemical vapor deposition (PECVD) using GeH4 and CH4 precursors. Optical parameters of the Ge1-xCx coating such as refractive index, Absorption coefficient, extinction coefficient and band gap were measured by the Swanepoel method based on the transmittance spectrum. The results showed that the refractive index of the Ge1−xCx coatings at the band of 2 to 2.2 µm decreased from 3.767 to 3.715 and the optical gap increased from 0.66 to 0.72 eV as CH4:GeH4 increases from 10:1 to 20:1.

Determination of Optical Properties in Germanium Carbon Coatings Deposited by Plasma Enhanced Chemical Vapor Deposition Keywords:

Ge1−xCx , PECVD , Optical coatings , Optical properties.

Determination of Optical Properties in Germanium Carbon Coatings Deposited by Plasma Enhanced Chemical Vapor Deposition authors

F. Sousani

Faculty of Materials Science and Engineering, Malek Ashtar University of Technology, Esfahan, Iran

R. Mozafarinia

Faculty of Materials Science and Engineering, Malek Ashtar University of Technology, Esfahan, Iran

A. Eshaghi

Faculty of Materials Science and Engineering, Malek Ashtar University of Technology, Esfahan, Iran

H. Jamali

Faculty of Materials Science and Engineering, Malek Ashtar University of Technology, Esfahan, Iran

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