A Novel High Sensitivity MEMS Acoustic Sensor using Corrugated Diaphragm
Publish place: majlesi Journal of Electrical Engineering، Vol: 11، Issue: 4
Publish Year: 1396
نوع سند: مقاله ژورنالی
زبان: English
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شناسه ملی سند علمی:
JR_MJEE-11-4_007
تاریخ نمایه سازی: 15 اسفند 1401
Abstract:
In this paper we presented a novel MEMS acoustic sensor using corrugated diaphragm. The corrugated diaphragm is used to decrease the effect of residual stress and thus improve the sensitivity of micromachined acoustic sensor. The displacement and mechanical sensitivity of flat and corrugated diaphragms, and also open-circuit sensitivity and pull-in voltage of sensors are calculated using MATLAB and simulated using FEM (finite element method). The results show that the displacement and mechanical sensitivity of corrugated diaphragm are bigger than the flat one. The pull-in voltage of corrugated sensor is smaller and the open-circuit sensitivity is much higher than the sensor with flat diaphragm. The results also show that the analytical model is very close with FEM simulation results.
Authors
Bahram Azizollah Ganji
Department of Electrical and Computer Engineering, Babol University of Technology, Babol
Mehdi Taybi
Department of Electrical and Computer Engineering, Babol University of Technology, Babol, Iran
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