Design and Simulation of a Dual-Mode Resonant Temperature sensor Based on MEMS Technology
Publish place: Telecommunication devices، Vol: 8، Issue: 4
Publish Year: 1398
نوع سند: مقاله ژورنالی
زبان: English
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شناسه ملی سند علمی:
JR_TDMA-8-4_004
تاریخ نمایه سازی: 30 فروردین 1402
Abstract:
In this paper, a dual-mode (DM) micromechanical elliptical ring resonator for use in temperature sensing is reported. The proposed resonator is made of single crystal silicon and works based on beat frequency (fb). In the designed sensor, temperature coefficient of beat frequency (TCfb) will be increased significantly by minimizing the fb and provides better temperature sensitivity. This proposed device was designed and simulated by COMSOL Multyphysics software. By engineering the device geometry, we introduce two adjacent resonant frequencies which produce very small fb in the range of ۲ kHz. The device shows TCf۱ of about ۴۴ ppm/ºC and TCf۲ of ۵ ppm/ºC. Combination of small fb and large ΔTCf, present temperature coefficient of beat frequency (TCfb) about ۱۱۲۰۰۰ ppm/ºC which has approximately ۷۵ improvement in TCfb compared to previous demonstrated DM resonators.
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Authors
Elham Farzanegan
Department of Electrical Engineering, Faculty of Engineering, Yadegar-e-Emam Khomeini (RAH) Shahr-e-Rey Branch, Islamic Azad University, Tehran, Iran
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